Accessories for stages, height support, cameras, light sources, optical filters, probes, holders, reference samples, and equipment interfaces.
Common accessories and options for TFM systems.
Manual stage and fixture options support wafers up to 12 inches. Larger samples can be reviewed on request.
370 × 470 mm class motorized stage option.
The reference sample is 500 nm SiO₂. Nominal 850 nm, 1000 nm, and 2000 nm options are available on request.
Standard or long-range probe option, including 5 m and 10 m lengths.
Optional Z-axis package for height-variable samples and autofocus support.
450 nm or 500 nm cut-on options for photoresist-sensitive checks.
Illumination source for standard reflectance measurement setups.
Broadband source option for UV-VIS reflectance setups.
Microscope-mounted camera for surface viewing and manual focus checks.
Probe holder for stable positioning on curved or large coated parts.
PET reference films for µm-range transparent-film workflow checks.
Trigger/status bit communication option for equipment integration.