APPLICATION

Al₂O₃ Thin Film Measurement

Aluminum oxide films for dielectric, barrier, passivation, and optical coating applications.

Al₂O₃MetalCoating
Al₂O₃ Thin Film Measurement sample

Sample Overview

  • ● Sample: Al₂O₃ on metal or mask substrate
  • ● Typical thickness: Sub-µm to several µm examples
  • ● Method: Reflectance-based thickness measurement, subject to sample condition and optical contrast.

Measurement Considerations

Model selection depends on the film stack, substrate, target thickness range, surface condition, and optical contrast.

All Applications

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Related TFM Systems

TFM system selection depends on sample geometry, required throughput, and measurement workflow.

TFM-100A compact reflectance-based TFM system for thickness measurement on wafer, glass, polymer, and coating samples.View →TFM-500A motorized TFM system for automated multi-point thickness mapping on wafer, glass, panel, and process samples.View →TFM-ContactA contact-style TFM package for large, curved, or installed coated parts where the probe moves to the part.View →TFM-RemoteTFM measurement system for external control, remote operation, and integration workflows.View →